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- Improved SiCOI Structures Elaborated by Heteroepitaxy of 3C-SiC on SOI hal link

Auteur(s): Chassagne Thierry, Ferro Gabriel, Wang H. Y., Stoemenos Yanis, Peyre H., Contreras S., Camassel J., Monteil Yves, Ghyselen B.

Conference: International Conference on Silicon and Carbide and Related Materials 2001 (9th) (ICSCRM2001) (Tsukuba, JP, 2001-10-28)
Actes de conférence: Materials Science Forum, vol. 389-393 p.343-346 (2002)


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