Improved SiCOI Structures Elaborated by Heteroepitaxy of 3C-SiC on SOI Auteur(s): Chassagne Thierry, Ferro Gabriel, Wang H. Y., Stoemenos Yanis, Peyre H., Contreras S., Camassel J., Monteil Yves, Ghyselen B.
Conference: International Conference on Silicon and Carbide and Related Materials 2001 (9th) (ICSCRM2001) (Tsukuba, JP, 2001-10-28) |