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AlGaN is an important material in the design of nitride devices. However, little is known concerning its growth with high Al contents. We have studied the growth of AlxGa1-xN epilayers on c-face sapphire by low pressure MOVPE (76 Torr), using triethylgallium, trimethylaluminum and ammonia as precursors. The solid versus gas phase composition relationship was determined experimentally and was fitted using a kinetic model. Then the structural properties of the layers (x = 0-1) were studied, using X-ray diffraction, scanning electron microscopy and transmission electron microscopy. We demonstrate that at high Al content, the buffer layer defects are replicated into the AlGaN layer. (C) 1997 Elsevier Science S.A.